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Logic suggests that you started out with a clean filter and no codes ... There was no problem at that time... Problem became when You cleaned the filter...
I would check for leaks/unmetered air in the CAI assembly ... Depending on how far apart you needed to tear it down to get the filter off...
You could try a new filter... One you haven't oiled
Lastly I would try a new MAF... You might have ruined it
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